Browsing by Subject "2DEG"

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  • Cooil, Simon Phillip; Mazzola, Federico; Klemm, Hagen W.; Peschel, Gina; Niu, Yuran R.; Zakharov, Alexei A.; Simmons, Michelle Y.; Schmidt, Thomas; Evans, David; Miwa, Jill A.; Wells, Justin W (2017-02-09)
    We develop a method for patterning a buried two-dimensional electron gas (2DEG) in silicon using low kinetic energy electron stimulated desorption (LEESD) of a monohydride resist mask. A buried 2DEG forms as a result of ...