| dc.contributor.author |
Palmer, R. E. |
|
| dc.contributor.author |
Bedson, T. R. |
|
| dc.contributor.author |
Jenkins, Tudor |
|
| dc.contributor.author |
Hayton, D. J. |
|
| dc.date.accessioned |
2008-12-09T09:00:04Z |
|
| dc.date.available |
2008-12-09T09:00:04Z |
|
| dc.date.issued |
2001 |
|
| dc.identifier.citation |
Palmer , R E , Bedson , T R , Jenkins , T & Hayton , D J 2001 , ' Quantitative evaluation of electron beam writing in passivated gold nanoclusters ' Applied Physics Letters , vol 78 , no. 13 , pp. 1921-1923 . |
en |
| dc.identifier.issn |
0003-6951 |
|
| dc.identifier.other |
PURE: 89135 |
|
| dc.identifier.other |
dspace: 2160/1453 |
|
| dc.identifier.uri |
http://hdl.handle.net/2160/1453 |
|
| dc.description |
Jenkins, Tudor; Hayton, D.J.; Bedson, T.R.; Palmer, R.E., (2001) 'Quantitative evaluation of electron beam writing in passivated gold nanoclusters', Applied Physics Letters (78) pp.1921-1923 RAE2008 |
en |
| dc.description.abstract |
We report a quantitative investigation of direct electron beam writing in monolayer films of passivated gold nanoclusters. In this process, the passivating organic ligands are (partially) removed to create gold-based nanostructures. We report the fabrication of lines with width as narrow as 26 nm, while measurements of the linewidth as a function of dose allow us to obtain a quantitative measure of the sensitivity, for comparison with established negative tone resists. |
en |
| dc.format.extent |
3 |
en |
| dc.language.iso |
eng |
|
| dc.relation.ispartof |
Applied Physics Letters |
en |
| dc.title |
Quantitative evaluation of electron beam writing in passivated gold nanoclusters |
en |
| dc.type |
Text |
en |
| dc.type.publicationtype |
Article (Journal) |
en |
| dc.identifier.doi |
http://dx.doi.org/10.1063/1.1354154 |
|
| dc.contributor.institution |
Institute of Mathematics & Physics (ADT) |
en |
| dc.contributor.institution |
Mathematics and Physics |
en |
| dc.description.status |
Peer reviewed |
en |